The global chip shortage has reoccurred, and the semiconductor manufacturing industry has attracted much attention. The industry has a long industrial chain and can be divided into three major processes: single crystal silicon wafer manufacturing - front-end process - back-end process. These three major manufacturing processes involve many equipments, such as single crystal furnaces, photolithography machines, crystal Circle detection and more. Affected by the high-precision requirements of semiconductors and the market structure, the power supplies of these equipment need to meet the requirements of high reliability, high performance, strong transient load capacity, and localization.
(1) Standard rail power supply: high reliability, excellent EMC
The production environment of monocrystalline silicon wafer manufacturing is harsher than that of the latter two processes. Dust and wastewater are generated during the production process. Therefore, higher requirements are placed on the reliability and protection capabilities of the equipment's power supply.
The power supply scheme of the single crystal furnace can be simplified as shown below. The factory uses electricity to supply two main power supplies. One is supplied by a 480W standard rail power supply to the control panel, display screen, sensors, etc., and the other is supplied by a 150W chassis switching power supply. to cameras and other auxiliary equipment.
Taking the standard rail LIF480-10B24R2 as an example, this product meets the requirements of wide input voltage 85-264VAC/120-370VDC, wide operating temperature -40℃ to +70℃, high isolation withstand voltage 3000VAC, high PF value >0.99, and low ripple noise 50mV, etc.; and it has the advantages of being able to withstand 305VAC input voltage for 5 seconds, small size (48mm width), and complete protection functions, and can be used in semiconductor manufacturing and other fields.
(2) High-end rail power supply: high precision, low ripple
After single crystal silicon wafer manufacturing, it enters front-end processes such as thin film deposition, photolithography, and ion implantation. At this time, the process environment of the equipment is relatively better, and the power supply of the equipment pays more attention to parameters such as accuracy and ripple.
Take the photolithography machine as an example. The power supply scheme of the photolithography machine is as shown below. The power consumption in the factory is roughly divided into two channels. One channel is powered by an ultra-high-power power supply to the lighting system, and the other channel can be powered by a 240W/480W rail power supply to each sub-system.
The 240/480W power supply can choose the WEHO high-end rail LIMF series. This series has powerful performance and meets the needs of high precision and low ripple noise; it also has features such as 150% peak power and ModBus communication function. In addition, its reliability and service life have been greatly improved. For example, it meets explosion-proof certification, can operate at full load at 60°C, provides a 5-year warranty, and has the advantages of salt spray resistance, 5G earthquake resistance, and three-proof paint protection.
(3) Medium and high power chassis switching power supply: high efficiency, low consumption, high power density
The back-end process mainly includes thinning, dicing, lead stitching, molding, etc. The equipment power supply can use medium and high-power chassis switching power supply to meet the needs of high power and low ripple.
Taking wafer inspection equipment as an example, the equipment power supply scheme can be similar to the figure below. Use one 3000W power supply or two 1500W power supplies in parallel to increase the power, supply power to cabinets, sliding tables, etc., then step down the voltage to 12V through the DC/DC module URB2412ZP-6WR3, and then supply power to the back-end MCU and communication module.
Take the 1500W LMF1500-20B24 as a medium and high power case switching power supply. This product is small in size and has a power density as high as 19.18W/inch³. It also has the advantages of low power consumption, high efficiency and high reliability. In addition, it also has the advantages of wide operating temperature -40℃ to +70℃, active PFC, supports 3+1 parallel redundancy, current sharing, output short circuit, 5s constant current, overvoltage, and overtemperature protection functions, and can be used well. In semiconductor equipment such as wafer inspection.
(4) Supporting modules: Complete supporting facilities and complete protection functions
The power supply solution for semiconductor industry equipment not only includes the above-mentioned rail and frame power supplies, but also includes redundant modules, UPS modules, EMC filters and other supporting modules, DC/DC modules, communication bus modules and other board-side power supplies, radio frequency Power supply, DC high voltage power supply and other special power supplies.
WEHO has its own one-stop power supply solution in the field of semiconductor manufacturing equipment. It has products to match from front-end to back-end, which can bring high precision, low ripple, good EMC characteristics, and transient load to the majority of users. High-quality domestic power supply with strong capabilities and long service life.
